## [# EUV ETF: The Chip-Making Technology Fueling AI](/sections/news/euv-etf-chip-making-technology-fueling-ai)
# EUV ETF: The Chip-Making Technology Fueling AI
The EUV ETF gives investors targeted exposure to extreme ultraviolet lithography — the chip-making technology that makes AI chips like Nvidia's H100 possible. Here's what you need to know.
[](/contributors/etfcom-staff)
[By ETF.com Staff](/contributors/etfcom-staff)
May 22, 2026
Edited by: ETF.com Staff
[ + Follow ](/etf/login)
Share Email LinkedIn Facebook X (Twitter)
googletag.cmd.push(function() {
googletag.display('js-dfp-tag-article_page_302x26');
});
Loading
Every cutting-edge AI chip in existence — from Nvidia's H100 to Apple's M4 — was manufactured using extreme ultraviolet (EUV) lithography. Without it, the AI revolution simply couldn't have happened. Now investors can get direct exposure to this critical technology through the [**EUV**](https://www.etf.com/EUV) ETF.
## What Is EUV Lithography?
Extreme ultraviolet lithography uses light with a wavelength of just 13.5 nanometers — roughly 40 times shorter than visible light — to etch billions of transistors onto silicon wafers with extraordinary precision. It's the foundational process behind every chip built at 7nm and below, which covers virtually all of today's high-performance AI, smartphone, and data center chips.
ASML Holding (ASML) is the only company in the world that manufactures EUV machines, each costing over $200 million and requiring parts from more than 5,000 suppliers across 30 countries. That near-monopoly makes ASML — and by extension, the EUV ecosystem — one of the most strategically significant chokepoints in the global technology supply chain.
googletag.cmd.push(function() {
googletag.display('js-dfp-tag-in_article_unit');
});
## What Does the [EUV](https://www.etf.com/EUV) ETF Hold?
The [**EUV**](https://www.etf.com/EUV) ETF provides concentrated exposure to companies in the EUV lithography ecosystem, including equipment makers, materials suppliers, and the chipmakers who depend on EUV processes. Key holdings typically include:
- **ASML Holding (ASML)** — the world's sole EUV machine manufacturer and the ETF's dominant position
- **TSMC (TSM)** — the world's largest chipmaker and the biggest consumer of EUV machines
- **Samsung Electronics** — the second-largest EUV user, competing with TSMC at leading-edge nodes
- **Applied Materials (AMAT) and Lam Research (LRCX)** — adjacent semiconductor equipment companies that support EUV processes
- **JSR Corporation and Shin-Etsu Chemical** — photoresist and materials suppliers critical to EUV manufacturing
## Why Is EUV Trending Now?
The [**EUV**](https://www.etf.com/EUV) ticker page on ETF.com is seeing 2,635 monthly page views — making it one of the fastest-rising ETF tickers on the site. Three catalysts are driving the surge in investor interest:
**1. AI chip demand is exploding.** Every major AI chip — from Nvidia's Blackwell architecture to AMD's MI300 — requires EUV lithography to manufacture. As AI infrastructure spending accelerates, demand for EUV capacity is growing in lockstep.
**2. Geopolitical scarcity.** The U.S. and its allies have blocked ASML from selling EUV machines to China, creating a hard technological ceiling on Chinese AI ambitions. This makes EUV exposure effectively a bet on Western semiconductor supremacy — a theme that has resonated strongly with investors since 2022.
**3. The DRAM halo effect.** The explosive rise of the [**DRAM**](https://www.etf.com/DRAM) ETF (+263.5% in page views this month) has investors exploring the broader AI chip manufacturing ecosystem. EUV is the natural next step — the technology that makes DRAM and logic chips at the leading edge possible.
## [EUV](https://www.etf.com/EUV) vs. Broader Semiconductor ETFs
How does the [**EUV**](https://www.etf.com/EUV) ETF stack up against the more established semiconductor plays investors already know?
[**EUV**](https://www.etf.com/EUV) **vs.** [**SMH**](https://www.etf.com/SMH)**:** The VanEck Semiconductor ETF ([**SMH**](https://www.etf.com/SMH)) offers broader semiconductor exposure with over 25 holdings. [**EUV**](https://www.etf.com/EUV) is more concentrated, with heavier ASML weighting — making it a higher-conviction bet on the equipment layer rather than chip designers.
[**EUV**](https://www.etf.com/EUV) **vs.** [**SOXX**](https://www.etf.com/SOXX)**:** The iShares Semiconductor ETF ([**SOXX**](https://www.etf.com/SOXX)) tracks an index of 30 U.S.-listed semiconductor companies. Because ASML is Dutch-listed, [**SOXX**](https://www.etf.com/SOXX) offers less direct EUV exposure than the [**EUV**](https://www.etf.com/EUV) ETF itself.
[**EUV**](https://www.etf.com/EUV) **vs.** [**DRAM**](https://www.etf.com/DRAM)**:** Where DRAM targets AI memory chips specifically, EUV targets the manufacturing infrastructure that makes all advanced chips — memory and logic — possible. They're complementary rather than competing.
## The Investment Case
The bull case for [**EUV**](https://www.etf.com/EUV) is straightforward: every advanced chip requires EUV lithography, and there is exactly one supplier of the machines that do it. As AI drives exponential demand for more powerful semiconductors, EUV lithography becomes more — not less — strategically essential.
The risks are real, however. The ETF carries heavy concentration in ASML, which means any regulatory change, trade dispute, or demand slowdown at major customers like TSMC could create outsized volatility. EUV machines are also extraordinarily capital-intensive, meaning the industry is sensitive to semiconductor capex cycles.
For long-term investors who believe in the AI infrastructure buildout, [**EUV**](https://www.etf.com/EUV) offers something few ETFs can: exposure to the single most irreplaceable step in the chip manufacturing process.
*This article is for informational purposes only and does not constitute investment advice. Past performance is not indicative of future results.*
---
*This article was generated with the assistance of artificial intelligence and reviewed by ETF.com staff.*
**Investment Risk Disclosure**
The information provided on this website is for informational and educational purposes only and does not constitute investment advice, financial advice, trading advice, or any other sort of advice. Nothing on this site should be construed as a recommendation to buy, sell, or hold any security or financial product.
**General Investment Risks**
Investing involves risk, including the possible loss of principal. Past performance is not indicative of future results. The value of investments may fluctuate, and investors may receive back less than they originally invested. There is no guarantee that any investment strategy will achieve its objectives.
**ETF-Specific Risks**
Exchange-traded funds (ETFs) are subject to risks similar to those of stocks and other equity securities. ETF shares are bought and sold at market price, which may differ from the fund's net asset value (NAV). Brokerage commissions may apply and will reduce returns. ETFs may be subject to the following additional risks:
**Market Risk:** The value of an ETF may decline due to broad market fluctuations unrelated to the underlying securities.
**Liquidity Risk:** Some ETFs may have limited trading volume, which could make it difficult to buy or sell shares at a desired price.
**Tracking Error Risk:** An ETF may not perfectly replicate the performance of its benchmark index.
**Concentration Risk:** Sector or thematic ETFs may be concentrated in a particular industry or geography, increasing volatility.
**Currency Risk:** ETFs that invest in international securities may be affected by exchange rate fluctuations.
Leverage and Inverse Risk: Leveraged and inverse ETFs are designed for short-term trading and may not be suitable for long-term investors. These products use derivatives and may experience significant losses.
**No Warranty**
While efforts are made to ensure the accuracy of information presented, no warranties are made regarding completeness, accuracy, or timeliness. Information may change without notice.
**Not a Fiduciary**
This site does not act as a fiduciary on behalf of any user. Users are encouraged to consult with a registered investment advisor, financial planner, or other qualified professional before making any investment decisions.
[ + Follow ](/etf/login)
[ETF.com Staff](/contributors/etfcom-staff)
etf.com is the single source for ETF intelligence. We provide real-time ETF news and analysis to educate investors and drive financial knowledge in… [View Bio](/contributors/etfcom-staff)
Related Topics [Semiconductors](http://www.etf.com/topics/semiconductors)
[Technology](http://www.etf.com/topics/technology)
[Technology](http://www.etf.com/topics/technology-0)